NovaSensor P162 | Medical Pressure Sensor Die

NovaSensor P162 Medical Silicon Gage Pressure Sensor Die are piezoresistive pressure sensor die offered in a miniature 1150 x 725 mm die that is small enough for three French catheters. The small die size is made possible by NovaSensor’s proprietary Silicon Fusion Bonding (SFB) process. When excited with an AC or DC voltage source, the P162 produces a mV output that is proportional to input pressure.

The P162 is in a halfbridge design, where external resistors are needed to complete a full bridge configuration.

Applications

IUP

Intracranial

Disposable Pressure Catheters: Intrauterine, Intracranial, Body

Features

Very small size
Gage pressure sensing
Standard pressure range –50 to 300 mmHg Gage
AC or DC excitation
4000 mmHg burst limit
Wafer location marked on every die for traceability
Tight control of sensitivity

Specifications

Die dimensions (l x w x h): 1150 μm x 725 μm x 170 μm
P162 schematic diagrams

Performance Parameters⁽¹⁾	Value⁽⁴⁾	Units	Notes
Notes Values measured at 0.6 mA and 71.6°F (22 °C) unless noted with 800 Ω resistor between +Out and –IN, and –Out and –IN. Die performance will vary depending on die attach material. The die attach material should be chosen to minimize package stress transmitted to the sensor die. Sensitivity at 100 mmHg. Extrapolated error at 300 mmHg by straight line through 0 and 100 mmHg pressure readings Topside pressure. Percent of the bridge resistor with the lowest value. Symmetry is the difference between the two bridge resistor values. A protective coating must cover the sensor die for use with saline and other fluids. 15 °C to 40 °C.
Pressure Range	-50 to 300	mmHg	Gage
Operating Temperature	50 to 122	°F	(10°C to 50°C)
Excitation	1 to 8	Volts	AC or DC
Zero Offset	±12.5	mV/V
Sensitivity	12 to 27	uV/V/mmHg	2
Linearity and Pressure Hysteresis	±2% of reading or ±1 mmHg whichever is larger	%FSO	3, 4
Temperature Coefficient of Zero	±40	μV/ V / °C	7
Temperature Coefficient of Zero Non-Linearity	±1.25	mmHg	7
Temperature Coefficient of Resistance	0.1	% /°C	Typical
Temperature Coefficient of Sensitivity	-0.2	%FSO/°C	Typical
Bridge Resistance	800 ± 20%	Ω
Symmetry	±5	%	5
Burst Pressure	4000	mmHg	Gage
Media Compatibility	Clean, dry, and non-corrosive gases		6