NovaSensor PT1907

Pressure Sensor Die

NovaSensor PT1907 is a piezoresistive sensor die that is designed for combined pressure and temperature measurements in harsh media. Pressure is applied from the backside of the die, which eliminates direct contact between the topside of the sensor circuitry and the applied media. This allows PT1907 to measure pressure and temperature in aggressive liquids and gases.

A vacuum reference cavity made with a Silicon cap on top of die is used for absolute pressure measurement. PT1907 also features excellent long-term stability and repeatability (< 0.1% / year typical), made possible by the NovaSensor SenStable® process.

The integrated on-chip temperature sensor allows for high accuracy measurement of temperature and improves accuracy of pressure measurement.