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  • NovaSensor PT1907 | Pressure & Temperature Sensor Die

NovaSensor PT1907 | Pressure & Temperature Sensor Die

    Pressure Sensor Die

NovaSensor PT1907 Pressure and Temperature Sensor Die

NovaSensor PT1907 is a piezoresistive sensor die that is designed for combined pressure and temperature measurements in harsh media. Pressure is applied from the backside of the die, which eliminates direct contact between the topside of the sensor circuitry and the applied media. This allows PT1907 to measure pressure and temperature in aggressive liquids and gases.

A vacuum reference cavity made with a Silicon cap on top of die is used for absolute pressure measurement. PT1907 also features excellent long-term stability and repeatability (< 0.1% / year typical), made possible by the NovaSensor SenStable® process.

The integrated on-chip temperature sensor allows for high accuracy measurement of temperature and improves accuracy of pressure measurement.

 

  • Applications
  • Features
  • Specifications
  • Product Documents
  • Part Nos.

Applications

  • Automotive systems
  • Process control systems
  • Aerospace
  • Pressure and temperature measurements in aggressive media

Features

  • Harsh media compatibility
  • Highly reliable, solid state silicon pressure sensor die pressurized from back (cavity) side
  • Pressure Ranges: 60, 120,180, 300, 450, 600 and 1000 PSIA
  • Temperature Range: -40°C to 150°C
  • On-chip temperature sensor
  • Die Dimensions (L x W x H): 1.9 mm x 1.9 mm x 1.6 mm (with glass), 2.0 mm x 2.0 mm x 0.8 mm (without glass)
  • Flexible bond pads configuration allows for wire bonding, either to only one side or two sides of the die

Specifications

Pressure Sensor Specifications
General Value Units Notes
Pressure Range 60, 120,180, 300, 450, 600, 1000 PSIA  
Maximum Overpressure 2X   Rated Pressure
Backside Burst Pressure 10X
>6000
PSI 2, 6
Electrical @ 25°C, Unless noted Value Units Notes
Excitation (DC) 1 mA  
5 Volt 10VDC Max
Bridge Resistance 5,000 ±20% Ω  
Environmental Value Units Notes
Operating Temperature Range -40 to 150 °C 2
Storage Temperature Range -55 to 160 °C  
Mechanical Value Units Notes
Dimensions 1.9 x 1.9 x 1.6
2.0 x 2.0 x 0.8
mm with glass
mm without glass
8
Bond Pad Dimensions 0.10 x 0.10 mm L x W 9
Media Compatibility Silicon and Borosilicate Glass  


  

Pressure Sensor Performance Parameters(1) Value Units Notes
Zero Offset ±10 mV/V  
FSO 160 ±45 mV 3
Pressure Linearity ±0.2 %Span 4, 7
Pressure Hysteresis ±10 µV/V 5, 7
Temperature Coef. of Zero ±5 µV/V/°C 5, 7
Temperature Coef. of Resistance 0.27 %°C 5, 7
Temperature Coef. of Sensitivity -0.19 %°C 5, 7
Thermal Hysteresis of Zero ±25 µV/V 5, 7

 

Temperature Sensor Specifications
General Value Units Notes
Temperature Range -40 to 150 °C  
Electrical Value Units Notes
Excitation (DC) 10-100 µA 13
Performance Parameters(10) Value Units Notes
Zero 0.625 V 7, 11
Sensitivity -2.15 mV/°C 7, 12
FSO 405 mV 7, 12
Linearity ±0.1 % 7, 12
Zero Pressure Sensitivity ±10 µV/PSI 7

Notes:

  1. All values measured at 25ºC and 5V excitation, unless otherwise noted. Samples from each wafer are used to verify bridge resistance, offset, span, linearity and die performance in the temperature range between 0ºC and 70ºC.
  2. Backside burst pressure and operating temperature for sensor utilizing PT1907 die can be lower than corresponding parameters for the die.
  3. Typical span is equal to 160mV at 300psi.
  4. Best fit in straight line.
  5. Between 0ºC and 70ºC.
  6. 10X of rated pressure for 60 to 300psi Die, >6000psi for 450 to 1000psi Die.
  7. Typical value.
  8. Die for high pressure (>300psi) has no glass pedestal.
  9. Aluminium bond pads.
  10. All values measured at 25ºC and 20 μA excitation, unless otherwise noted.
  11. 100% probed for zero output at 25ºC.
  12. Samples from each wafer are tested to verify sensitivity, FSO and linearity in the temperature range between 0ºC and 70ºC.
  13. 10-25 μA excitation is recommended.

Product Documents

English

NovaSensor PT1907 | Pressure & Temperature Sensor Die - Datasheet

  • Download

PLG_CONTENT_EDOCMANCATEGORYTAGS_

NovaSensor Product Spotlight | PT1907 Pressure & Temperature Sensor Die - Product Spotlight

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English

Amphenol Advanced Sensors | Connecting Your World Through Sensing Innovations - OEM Product Catalog

  • Download

Part Nos.

PT1907 

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